Facilities
Facilities
Cleanroom Nanofabrication Facility
TMI’s cleanroom is a 3,000 square feet facility, class 100 used primarily for lithography processes and class 1,000 for fabrication, etching and materials growth, and testing. A wide array of materials deposition tools are available including e-beam and sputtering systems, thermal evaporation systems in gloveboxes, and Langmuir-Blodgett trough. Located in the Faulkner Nanotechnology Building on the 4th floor, the space provides ample room for materials research across a wide range of materials classes.
AMOD Thermal Deposition System
Equipment Type:
Cleanroom Instrumentation
Thin Film Fabrication
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
AMOD Sputtering
Equipment Type:
Cleanroom Instrumentation
Thin Film Fabrication
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
Vacuum Ovens
Equipment Type:
Cleanroom Instrumentation
Nano and Micro Fabrication
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
Contact Angle Goniometer
Equipment Type:
Cleanroom Instrumentation
Metrology
Surface Analysis
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
Cooke e-beam and Sputtering System
Equipment Type:
Cleanroom Instrumentation
Thin Film Fabrication
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
Dektak 6M Stylus Profilometer
Equipment Type:
Cleanroom Instrumentation
Metrology
Microscopy/Surface Analysis
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
Denton Thermal Evaporator
Equipment Type:
Cleanroom Instrumentation
Thin Film Fabrication
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
Disco 321 Wafer Dicing Saw
Equipment Type:
Cleanroom Instrumentation
Nano and Micro Fabrication
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
EasyTube 3000 EXT Chemical Vapor Deposition (CVD) System
Equipment Type:
Cleanroom Instrumentation
Nano and Micro Fabrication
Plasma Etching and Material Growth
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
Fuljifilm DMP-2800 Dimatix Printer
Equipment Type:
Cleanroom Instrumentation
Lithography
Thin Film Fabrication
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
J.A. Wollam M2000 Spectroscopic Ellipsometer
Equipment Type:
Cleanroom Instrumentation
Metrology
Spectroscopy
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
KSV Langmuir-Blodgett Trough
Equipment Type:
Cleanroom Instrumentation
Thin Film Fabrication
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
Laurell Technologies Spincoater I
Equipment Type:
Cleanroom Instrumentation
Thin Film Fabrication
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
Laurell Technologies Spincoater II
Equipment Type:
Cleanroom Instrumentation
Thin Film Fabrication
Contact: Dr. Raluca Gearba
Location: EER 6.626
View Details
March Plasma CS170IF RIE Etching System
Equipment Type:
Cleanroom Instrumentation
Nano and Micro Fabrication
Plasma Etching and Material Growth
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
Kurt J Lesker Nano36 Thermal Deposition System
Equipment Type:
Cleanroom Instrumentation
Thin Film Fabrication
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
Oxford Instruments Plasma Lab 80+ PECVD and Etching
Equipment Type:
Cleanroom Instrumentation
Nano and Micro Fabrication
Plasma Etching and Material Growth
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
PVD75 e-beam and Sputtering System
Equipment Type:
Cleanroom Instrumentation
Thin Film Fabrication
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
Quorum Technologies Critical Point Drier
Equipment Type:
Cleanroom Instrumentation
Nano and Micro Fabrication
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
Samco RIE-1C Reactive Ion Etcher
Equipment Type:
Cleanroom Instrumentation
Nano and Micro Fabrication
Plasma Etching and Material Growth
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
Suss MA6 Mask Aligner
Equipment Type:
Cleanroom Instrumentation
Lithography
Nano and Micro Fabrication
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
West Bond Wire Bonder
Equipment Type:
Cleanroom Instrumentation
Nano and Micro Fabrication
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
Zeiss Axioscope 2 MAT Optical Microscope
Equipment Type:
Cleanroom Instrumentation
Metrology
Microscopy/Surface Analysis
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
Zygo Interferometer
Equipment Type:
Cleanroom Instrumentation
Metrology
Microscopy/Surface Analysis
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
Work Bench for Corporate Users
Equipment Type:
Cleanroom Instrumentation
Nano and Micro Fabrication
Contact: Dr. Raluca Gearba
Location: FNT 4.106
View Details
Electrical Characterization Instrumentation
Equipment Type:
Cleanroom Instrumentation
Electrical Characterization Instrumentation
Electronic and Optoelectronic Testing
Contact: Dr. Raluca Gearba
Location: FNT 4.102
View Details
SCS 6700 Spincoater
Equipment Type:
Cleanroom Instrumentation
Thin Film Fabrication
Contact: Dr. Raluca Gearba
Location: FNT 4.106
