Equipment Type:

Cleanroom Instrumentation

Thin Film Fabrication

Information the Equipment Can Provide

The Nano36 thermal deposition system from Kurt J Lesker will enable deposition of metals on substrates with a diameter of 150mm. The system has glovebox mating provisions, if needed.

Characteristics:

• Automated process control using KJL eKLipse software with graphic recipe builder
• Two thermal sources for co-deposition and Four sources for sequential deposition
• Source characteristics: DC power supply, up to 12V or 400A, max 2kW applied power
• Includes substrate and source shutters and cross contamination shields
• Substrate rotation up to 20 rpms
• Two crystal sensors. Controller executes rate and thickness control
• System base pressure: 5.0E-06 Torr
• Film uniformity, <8%

Fees and Policies

Cleanroom Entry fee: (The cleanroom entry fee is charged in addition to the cleanroom facility usage fee)

• UT Users: $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

Cleanroom Facility

• UT Users: $35/hour
• Higher Education/State Agencies (Assisted): $92/hour
• Corporate/External Users (Assisted): $94/hour
• Higher Education/State Agencies (Unassisted): $64/hour
• Corporate/External Users (Unassisted): $65/hour

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.

To become a user of this instrument you must first complete the Cleanroom Safety Class. Please contact the facility manager to schedule a training session.