Equipment Type:

Cleanroom Instrumentation

Nano and Micro Fabrication

Information the Equipment Can Provide

Several ovens are available in TMI’s cleanroom.

Isotemp Vacuum Oven, Model 281A, Fisher Scientific (Vac_Oven_2 in FBS)

• Vacuum range: 0 to 30 in.Hg
• Dial-in temperatures up to 280°C
• Temperature control +/-1°C
• Dimensions (DxWxH interior:11.5X10X10 in.)

Isotemp Vacuum Oven, Model 280A, Fisher Scientific (Vac_Oven_1 in FBS)

• This oven is mostly used for photoresist baking
• Vacuum range: 0 to 30 in.Hg
• Vacuum range: 0 to 30 in.Hg
• Temperature control +/-2°C
• Dimensions (DxWxH interior:11.125X9.5X9.5 in.)

Lindberg Blue/Gravity Oven

• Temperature range: 40 to 260C
• Ambient pressure

Fees and Policies

There are no fees associated with using the Vacuum Ovens, except the cleanroom entry fee.

Do not attempt to use the ovens without prior training.

Reserve the Vacuum Ovens in FBS and start timer.

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.

To become a user of this instrument you must first complete the Cleanroom Safety Class. Please contact the facility manager to schedule a training session.