Equipment Type:

Cleanroom Instrumentation

Metrology

Microscopy/Surface Analysis

Surface Analysis

Information the Equipment Can Provide

The Dektak 6M is a film step height measurement tool capable of measuring steps from 260 microns down to 10 nm. You can also use this tool to profile surface topography and measure surface roughness in the nanometer range. The system is currently equipped with a 25-micron radius high aspect ratio stylus.

Maximum acceptable sample size is 6 inches.

Fees and Policies

• UT Users: $31/hour
• Higher Education/State Agencies: $54/hour
• Corporate/External Users: $46/hour

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.

To become a user of this instrument you must first complete the Cleanroom Safety Class. Please contact the facility manager to schedule a training session.