Hysitron TI-950 Triboindenter

Information the Equipment Can Provide

Coming soon

Fees and Policies

• UT Users: $15/hour
• Higher Education/State Agencies: $42/hour
• Corporate/External Users: $42/hour

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.

To become a user of this instrument you must first complete the Cleanroom Safety Class. Please contact the facility manager to schedule a training session.

KLA P-7 Stylus Profilometer

Instrument Capabilities

The KLA P-7 is a high-precision contact surface profilometer used to quantitatively characterize surface topography and thin-film features. The system measures film thickness, step height, etch depth, and surface roughness by moving a stylus across the sample surface and recording changes in surface height.
The system is currently equipped with a 2.5 µm-radius stylus with a 60° cone angle, providing a balance between measurement sensitivity and the ability to characterize patterned and microfabricated structures.

Key features:

• Profiles are independent of sample type, allowing characterization of a wide range of materials and substrates
• Z-axis resolution: 5.7 Å
• Vertical measurement range: 0–327 µm with three selectable ranges:
  • 0–13 µm
  • 0–65 µm
  • 0–327 µm
• Variable stylus force: 0.5–50 mg
• Maximum substrate thickness: 1 inch
• 6-inch diameter stage for wafer and sample handling
• Vacuum hold-down for secure positioning of substrates during measurement
• Motorized leveling for controlled sample alignment
• Manual sample rotation for measurement orientation and profile positioning
• 2.5 µm stylus tip radius
• 60° stylus cone angle

Fees and Policies

• UT Users: $35/hour
• Higher Education/State Agencies (Assisted): $92/hour
• Corporate/External Users (Assisted): $94/hour
• Higher Education/State Agencies (Unassisted): $64/hour
• Corporate/External Users (Unassisted): $65/hour

A cleanroom entry fee will be charged in addition to the cleanroom facility usage fee.

• UT Users $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

Traning

Users should register for the required in-person training course through UTLearn.

HMDS YES OVEN

Instrument Capabilities:

• The YES prime oven dehydrates the wafers at 150°C and primes the wafers using hexamethyldisilazane (HMDS) allowing better coverage and adhesion between oxides are resists.
• Controlled vapor-phase HMDS priming for uniform surface treatment.
• The HMDS oven is configured with settings 0 and 1 which correpsond to 5 minutes and 1 minute prime, respectively.
• Precise temperature and process time control for repeatable results.
• Uniform HMDS vapor distribution across the substrate.
• Vacuum-assisted process to enhance adhesion promotion.
• Compatible with silicon, glass, quartz, and other substrate materials.
• Available holders for wafer sizes: 3 inches and 4 inches; smaller pieces can be mounted on a carrier wafer using the provided heat resistant Kapton tape.

Fees and Policies

A cleanroom entry fee will be charged in addition to the cleanroom facility usage fee.

• UT Users: $35/hour
• Higher Education/State Agencies (Assisted): $92/hour
• Corporate/External Users (Assisted): $94/hour
• Higher Education/State Agencies (Unassisted): $64/hour
• Corporate/External Users (Unassisted): $65/hour

Cleanroom Facility

• UT Users: $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

Traning

Please contact Dr. Raluca Gearba and/or James Smitherman to schedule a training session.