Equipment Type:

Microscopy/Surface Analysis

Surface Analysis

• This instrument is a highly versatile, highly automated, multi-technique instrument, with a monochromatic, micro-focused X-ray source and 180° hemispherical electron energy analyzer optimized  for high sensitivity spatially resolved chemical state analysis. 
• The VersaProbe offers excellent micro-area spectroscopy performance with spot sizes between 7 and 300 mm and easily adjusted power. 
• Available Ar Ion Cluster Gun  (2.5  to 20kV) for surface cleaning and depth profiling. 
• The system is also equipped with ultraviolet photoelectron spectroscopy (UPS) and reflection energy loss spectroscopy (REELS) .
• The system also provides Auger Electron Spectroscopy (AES) for imaging with better resolution than XPS ( 150 nm beam diameter). 

Key Features

• Al and Zn/Mg (600W) X-ray sources
• Cooling/heating stage: -140°C to 800 °C 
• Depth resolution: 2 to 8 nm
• Lateral resolution: 10 mm