Equipment Type:

Microscopy/Surface Analysis

Optical Profiles

Surface Analysis

Information the Equipment Can Provide

The VK-X1100 Optical profilometer from Keyence is a laser microscope which can measure roughness and film thickness with nanometer resolution. Laser microscopes utilize a special optical system consisting of a light source, a light receiving element, an objective lens, a half mirror, and a pinhole and use the confocal principle to detect the height information of the sample.

Principle: The laser light is scanned in the X and Y directions (2D). The field-of-view is divided into pixels, and the reflected light of each pixel is detected by the light receiving element. A motor is used to move the objective lens or the sample within a fixed range in the vertical direction. During this process, the position information of the objective lens and the amount of light received by the light receiving element are detected at the same time. The pinhole placed in front of the light receiving element filters out out-of-focus light and detects only in-focus pixels.

System Characteristics:

• 1024 × 768 pixels
• 404 nm laser
• sec per scan
• Lateral resolution: 120 nm
• Z-resolution: 6-8 nm
• Multiple steps in z direction
• Sample limitations: glass/reflective transitions

Fees and Policies

• UT Users: $21/hour
• Higher Education/State Agencies: $52/hour
• Corporate/External Users: $52/hour

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.

To become a user of this instrument please contact the facility manager to schedule a training session.