Back to Cleanroom Nanofabrication Facility
HMDS YES OVEN
Contact: Dr. Raluca Gearba
Email: gearba@austin.utexas.edu
Location: FNT 4.106
Equipment Type:
Cleanroom Instrumentation
Nano and Micro Fabrication
Thin Film Fabrication
Information the Equipment Can Provide
The AMOD Sputtering system is used to deposit various oxides and metals. The evaporation system is equipped with 2 RF deposition heads and e-beam capabilities. The process is controlled using quartz rate sensors.
Features
- Computer controlled system operation
- Base Pressure: 2 x 10-7 Torr achieved in 2 hours
- Recipe based advanced multi-layer deposition control
- Sequential or co-deposition of materials
- Stainless steel isolation shields help protect sources from cross contamination
- Offered sputtering targets: Al, ITO, Cr
Fees and Policies
- UT Users: $31/hour
- Higher Education/State Agencies: $54/hour
- Corporate/External Users: $46/hour
To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.
To become a user of this instrument you must first complete the Cleanroom Safety Class. Please contact the facility manager to schedule a training session.