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Zygo Interferometer

Contact: Dr. Raluca Gearba
Email:
Location: FNT 4.106

Equipment Type:

Cleanroom Instrumentation

Metrology

Microscopy/Surface Analysis

Information the Equipment Can Provide

The Zygo interferometer is a laser-based tool to measure large area topography of flat samples.  The system allows for rapid scanning of up to 6″ diameter samples at the lowest resolution. The He:Ne laser allows for the measurement of height changes of up to 632 nm over small distance.

Features

  • Rapid, noninvasive, large-area, topographical measurements of flat substrates
  • 120-micron lateral resolution at the lowest magnification, 20-micron resolution at the highest magnification

Fees and Policies

  • UT Users: $30/hour
  • Higher Education/State Agencies: $51/hour
  • Corporate/External Users: $65/hour

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.

Training Fees

  • UT Users: $30
  • Higher Education/State Agencies: $51
  • Corporate/External Users: $65

To become a user of this instrument you must first complete the Cleanroom Safety Class. Please contact the facility manager to schedule a training session.