ME 386S 1 – Thin Films and Interfaces

Course Details
Unique Number18625
Instructor Paul S. Ho
Meeting Days / TimeLecture: TTH, 2-3:30pm
LocationMER 2.114
Course Description

Application of thin films and interfaces in microelectronics; basic properties, deposition techniques, microstructures and defects, diffusion characteristics; materials reaction in thin films and at interfaces.

Course number may be repeated for credit when the topics vary.


Graduate standing and consent of the instructor.