Time of Flight Secondary Ion Mass Spectrometer (TOF.SIMS 5)

Reserve Equipment

Information the equipment can provide

► Ultra-high resolution mass spectrometry (up to 0.001 a.m.u.)

► Surface and bulk chemical composition (mass range up to 14,000 a.m.u., elemental sensitivity as high as parts-per-billion and surface sensitivity of a few atomic layers)

► Instrument Capabilities:
   ● Surface Spectroscopy:
     – elemental and molecular information
     – ppm to ppb elemental sensitivity
     – < 1 nm surface sensitivity
     – > 10000 mass resolution (m/δm)
     – mass range up 14000 a.m.u.
    ● Surface Imaging:
      – lateral resolution < 100 nm
     – parallel mass detection
    ● Depth Profiling:
     – depth resolution < 1 nm
     – thin films from < 1 nm to few hundreds μm
   ● 3D Analysis:
      – high depth resolution
     – high lateral resolution
     – parallel mass detection
    ● Retrospective Data Analysis:
     – complete data recording (mass, position and intensity)
     – data can be revisited anytime for additional analysis without further sample analysis
   ● Air-free Sample Transfer Capability:

     – air-free capsule available for sample transfer to and from user glove boxes

 ► Accepted Samples: metals, semiconductors, insulators, organic or inorganic, in solid or powder (needs to be pressed) form

 ► Available Sputtering Species:
    ● Analysis Species: Bi1+ (30 kV), Bi3+ (30 kV), Bi3++ (60 kV), C60+ (20 kV), C60++ (40 kV), C60+++ (60 kV)
    ● Sputtering Species: Cs+ or O2+ (250 V to 2 kV), C60+ (20 kV), C60++ (40 kV), C60+++ (60 kV)
 
UT researcher manipulates air sensitive samples inside an inert glove box for loading them into the capsule of the Rox interface. The capsule will then be hand carried to the Kratos XPS or the Tof-SIMS.

UT researcher manipulates air sensitive samples inside an inert glove box for loading them into the capsule of the Rox interface. The capsule will then be hand carried to the Kratos XPS or the Tof-SIMS.

The TOF-SIMS is also equipped with a set of chambers and a capsule (collectively called ROX interface) to transfer air sensitive samples from an argon (or nitrogen) filled glove box to the surface analysis chamber which is under ultra-high vacuum (UHV). The ROx Interface was designed and developed at the Texas Materials Institute (U.S. Patent Application Serial No. 14/445,650 filed July 29, 2014). Unlike commercial interfaces, the Rox interface was designed with a unique innovation: It has a built-in semi-quantitative method to monitor sample transfer reliability and validity.

Download a Word document or PDF with additional detail for this equipment.

Fees & Policies
  • Trained On-Campus Users: $54.00/hr
  • Higher Education/State Agencies:   $161/hr
  • Corporate Users:  $250/hr
Location:

FNT 2.106

Hours & Availability

NSF User Profile Form