Information the equipment can provide
The clean room spin coater is for spin coating of polymer materials for creating metal/polymer bilayers and spin coating of photoresist for patterning the photolithography process.
- Speed: 100-8000 RPM.
- Can handle substrate sizes within a radius of 6” inch.
Fees & Policies
- Trained On-Campus UT Users: $30/h
- Higher Ed/State Agencies: $54/h
- Corporate Users: $65/h
No charge when used in conjunction with Suss MA6 Mask Aligner or Raith50 Electron Beam Lithography System
Facility User Education
To become a user of this instrument please sign up for the next available NT201 facility user education class. External/Corporate users must contact the facility manager to setup an account before attending facility user education classes.
NT201 Cleanroom Safety Fee: $27.00