Laurell Technologies Spincoater

Reserve Equipment

Information the equipment can provide

The clean room spin coater is for spin coating of polymer materials for creating metal/polymer bilayers and spin coating of photoresist for patterning the photolithography process.

Features

  • Speed: 100-8000 RPM.
  • Can handle substrate sizes within a radius of 6” inch.
Fees & Policies
  • Trained On-Campus UT Users: $30/h
  • Higher Ed/State Agencies: $54/h
  • Corporate Users: $65/h

No charge when used in conjunction with Suss MA6 Mask Aligner or Raith50 Electron Beam Lithography System

Facility User Education

To become a user of this instrument please sign up for the next available NT201 facility user education class. External/Corporate users must contact the facility manager to setup an account before attending facility user education classes.

NT201 Cleanroom Safety Fee: $27.00

Location:

FNT 4.106

Contact

Raluca Gearba