Cleanroom: Spincoaters

Reserve Equipment

Information the equipment can provide

The TMI’s cleanroom is equipped with several spincoaters.

Laurell Spincoater/Specifications

  • The system is located into one of the solvent hoods.
  • Spincoater dedicated exclusively for processing of photoresist films.
  • Speeds: 100-8000 RPM.
  • Can handle substrate sizes within a radius of 6” inch.

 Specialty Coating Systems spincoater (Model 6700) /Specifications

  • The spincoater is incorporated into a MBraun glovebox.
  • Speeds: 100-8000RPM, spintime: up to 999 sec, acceleration: 1-30 sec, deceleration: 1-30 sec.
  • 3/4 inch. chuck.
  • 8 inch. bowl.
  • adjustable speeds and acceleration.
  • spinner cycles are easily programmable.

Specialty coating system (SCS) spincoater 

  • The system is located into one of the solvent hoods.
  • Allowed materials:  polymers and photoresist materials.
  • Speed: 0-9999 RPM.

 

Fees & Policies
  • Trained On-Campus UT Users: $30/h
  • Higher Ed/State Agencies: $51/h
  • Corporate Users: $65/h

Facility User Education

To become a user of this instrument please sign up for the next available NT201 facility user education class. External/Corporate users must contact the facility manager to setup an account before attending facility user education classes.

NT201 Cleanroom Safety Fee: $27.00

Location:

FNT 4.106

Contact

Raluca Gearba