Information the Equipment Can Provide
Hydrofluoric acid is a clear, colorless liquid which is an extremely dangerous material in all forms, including vapors and solutions.
Chemicals approved for use in the TMI’s cleanroom HF hood:
- Buffered oxide etchant (BOE), Buffer HF improved, solution UN2817, Transcene (mixture of ammonium hydrogen difluoride, hydrofluoric acid and water)
- Hydrofluoric acid (48 wt. %), 7667-39-3
Usage of any other mixtures with HF will have to be approved by the facility manager.
Supporting Documents:
Fees and Policies
Cleanroom Entry fee:
- UT Users: $6
- Higher Education/State Agencies: $10
- Corporate/External Users: $10
There are no fees associated with using the HF Hood, except the cleanroom entry fee.
Do not attempt to use the HF hood without prior training.
Hydrofluoric acid-based processes can be performed only between 8:00 AM to 5:00 PM, Monday through Friday.
Always work in pairs, reserve the HF hood in FBS and start timer.
To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.
To become a user of this instrument you must first complete the Cleanroom Safety Class. Please contact the facility manager to schedule a training session.
