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Kurt J Lesker Nano36 Thermal Deposition System

Contact: Dr. Raluca Gearba
Email:
Location: FNT 4.106

Equipment Type:

Cleanroom Instrumentation

Thin Film Fabrication

Information the Equipment Can Provide

The Nano36 thermal deposition system from Kurt J Lesker will enable deposition of metals on substrates with a diameter of 150mm. The system has glovebox mating provisions, if needed.

Characteristics:

  • Automated process control using KJL eKLipse software with graphic recipe builder
  • Two thermal sources for co-deposition and Four sources for sequential deposition
  • Source characteristics: DC power supply, up to 12V or 400A, max 2kW applied power
  • Includes substrate and source shutters and cross contamination shields
  • Substrate rotation up to 20 rpms
  • Two crystal sensors. Controller executes rate and thickness control
  • System base pressure: 5.0E-06 Torr
  • Film uniformity, <8%

Fees and Policies

  • UT Users: $30/hour
  • Higher Education/State Agencies: $51/hour
  • Corporate/External Users: $65/hour

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.

Training Fees

  • UT Users: $61
  • Higher Education/State Agencies: $191
  • Corporate/External Users: $191

To become a user of this instrument you must first complete the Cleanroom Safety Class. Please contact the facility manager to schedule a training session.