EE 396K 8 – Ultra Lrg Scale Integ Technq

Course Details
Unique Number16885
Instructor Sanjay K. Banerjee
Meeting Days / TimeLecture: MW, 10:30am-12:00pm
Lab: T, 6:30pm-9:30pm
LocationLecture EER 1.512/Lab EER 0.744
Course Description

Theory of electron, magnetic, and electro-optic devices. Integrated circuit processing; crystal growth and wafer preparation; epitaxial growth; oxidation, diffusion, and ion implantation; thin-film deposition techniques; lithography and etching.


EE 339 or the equivalent. Graduate standing and consent of instructor.