Cleanroom: Zygo Interferometer

Reserve Equipment

Information the equipment can provide

The Zygo interferometer is a laser based tool to measure large area topography of flat samples.  The system allows for rapid scanning of up to 6″ diameter samples at the lowest resolution.  The He:Ne laser allows for the measurement of height changes of up to 632 nm over small distance.


  • Rapid, noninvasive, large-area, topographical measurements of flat substrates
  • 120 micron lateral resolution at the lowest magnification, 20 micron resolution at the highest magnification
Fees & Policies
  • Trained On-Campus UT Users: $30/h
  • Higher Ed/State Agencies: $51/h
  • Corporate Users: $65/h

Facility User Education

To become a user of this instrument please sign up for the next available NT201 facility user education class. Please contact Dr. Raluca Gearba for specific instrument training. External/Corporate users must contact CNM to setup an account before attending facility user education classes.

NT201 Cleanroom Safety Fee: $27.00


FNT 4.106


Raluca Gearba