Cleanroom: Cooke e-beam and Sputtering System

Reserve Equipment

Information the equipment can provide


  • Ebeam evaporator for metals and certain oxides
  • RF sputter head for oxides and metals
  • DC sputter head for metals
  • Targets for sputtering should be 3″ diameter and 1/8″ to 1/4″ thickness
  • Aluminum sputter targets and copper crucible provided by CNM
  • Sample rotation available

All other materials for evaporation must be provided by the user.

Fees & Policies
  • Trained On-Campus UT Users: $30/h
  • Higher Ed/State Agencies: $51/h
  • Corporate Users: $65/h

Facility User Education

To become a user of this instrument please sign up for the next available NT201 and NT209 facility user education classes. External/Corporate users must contact the facility manager to setup an account before attending facility user education classes.

NT201 Cleanroom Safety Fee: $27.00

NT209 Thin Film Deposition Fee: $63.00


FNT 4.106


Raluca Gearba